Oil-free Scroll Vacuum Pumps
SCROLLVAC® SC 5D, SC 15D,and SC 30D.
In 1905, the principle of the scroll compressor was developed by the Frenchman Leon Creux. The scroll pump is now being used as an oil-free vacuum pump. Every scroll pump consists ot two Archimedes spirals engaging each other with an offset of 180°. Thus several crescent-shaped pockets of differing sizes are created. By means of an eccentric drive, a second spiral is made to orbit about a fixed spiral, thus reducing the volume of the pockets and compressing gases from the outside towards the inside thereby pumping the gases. Important to the quality of a scroll pump is that precise manufacturing tolerances are maintained and that suitable materials are selected.
| Advantages to the User | Typical Applications |
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- Absolutely oil-free - High effective pumping speed - Low ultimate pressure - Low noise level - Low vibration operation - Atmospheric inlet pressure allowable - Low weight - Air cooling - Low power consumption - Integrated operating hours counter |
- Electron beam welding - Lasers - Leak detection systems - Accelerators / synchrontrons - Surface analysis instruments - Scanning electron microscopes - Load lock - Spectroscopy - Lamp manufacturing - As a backing pump for turbomolecular pump systems |